SemiStory.com
2014년 5월 1일 목요일
[Used Spin Rinse Dryer]CaliTech CT-608
Application :
2”~ 12” Wafe
Specification :
•
With SUS-316L-EP Rotor
•
With SUS-316L-EP Bowl
•
With Viton door seal & real seal
•
Use Air seal for motor and Bowl
•
With Brushless Motor
•
With non-contact N2 heater
•
With 0.22 um / 0.003um filter
•
All PTFE DI and N2 Valve
•
All PFA Tube for DI and N2
•
With 5” LCD Touch Panel
Dimension :
CT-608 –
Double chamber : 500*705*1820mm
Single chamber : 500*630*1595mm
Maker : CaliTech
Model : CT-608
Vintage : 2010
Mail : phm7910@naver.com
Mobile : +821037623650
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