[Used LED Inspecter]Visual Inspecter IMS LVIS-Ⅲ

Item Model LVIS-III+ LVIS-X Vision Camera 3-CCD Color Camera B&W Line Scan Camera Lens Motorized Zoom Lens 5x Optical Microscope Lens Illuminator Coaxial/Side/Back Illuminator Inspection Stage Fix Method - Hoop Ring : Vacuum - Steel Frame : Vacuum and Magnetic XY Stage -Precision Ball Screw by servo motor. -Linear motor(Granite) Focus - Controls focus by step motor - Laser Displacement Sensor Loading / Unloading Unit Wafer Exchange - Loading/Unloading Time : 10 sec - Loading/Unloading Time : 6 sec Magazine / Cassette - Hoop : 15 wafers/magazine - Frame : 20 wafers/magazine Etc - Magazine Load Detect Function - Cassette Mapping Function Control System H/W - External Inface : LAN, USB 2 Port, RS232C 2Port - Auto Bar Code Scanner - UPS Power Backup Function S/W - Offline Function : 1. File Mapping 2. Review and Modify the result and Manage the statistical data 3. Production Management (MES, SECS-Gem etc) 4. Language : Korean / English / Chinese Utility Power Single 1.5 KW, AC 220V ±10% Single 2 KW, AC 220V ±10%, 50/60 Vacuum 60 ~ 80 KPa Air 0.4 ~ 0.6 MPa Etc Size 1,480(W) x 1,200(D) x 1,700(H) 1,500(W) x 1,200(D) x 1,700(H) Weights 850 Kg 1,100 Kg

Maker : IMS NANO TECH

Model : LVIS-Ⅲ

Mail : phm7910@naver.com
Mobile : +821037623650