[Used E-Beam]EBEAM EVA-E100

Model : EVA-E100
Process Chamber
Electro-Polished SUS304
Manually open/close addess door
12" gate valve
12" CTI cryo pump with compressor
SUS 304 contanination shield
External cooling water line and baking heater
Substrate Holder : 4P-1 Dome assy
​Capacity : 52 X 2" wafer
Dual Rotation Planetary
Adjustable Dome Rotating speed : 0 ~ 30 RPM
Vacuum System
4500 liter/mn Cryo Pump
1900 liter/min Rotary Pump
Valve unit and gauges with complete safety interlocks
High vacuum ion gauge and convectron gauge with MKS controller
Thickness Monitoring System
XTC-3
6 Crystal sensors
6 MHz ±0.05 MHz
Control Software
Fully automated windows based PC control software
All safety interlock included and data logging
All controller and PC is mounted Separated E-Rack

Vintage : 2010

Mail : phm7910@naver.com
Mobile : +821037623650