Veeco Wyko NT9100 Optical Profiler

SPECIFICATIONS
Measurement Capability     Non-contact, three-dimensional,
                                       topography and fi lm thickness



Objectives                        1.5X, 2.5X, 5X, 10X, 20X, 50X for
                                       magnifications from 0.75X to 100X;
                                       Long working distance objectives
                                       available;
                                       Optional motorized turret;
                                       Optional Through Transmissive Media
                                       objectives


Field-of-View Multipliers     0.55X, 0.75X, 1X, 1.5X, 2X


Measurement Array            640 x 480, non-interlaced;
                                       Optional 1392 x 1040 camera


Light Source                     Long-lifetime green and white LEDs

Optical Assembly               Dual LED illuminator;
                                       Three-position FOV turret, closed-loop,
                                       10mm scan


Stages                             Automated 100mm Z-axis;
                                       ±6° tip/tilt stage;
                                       100mm XY manual stage, standard;
                                       150mm XY auto stage, optional


Computer System               Latest Dell® with 24/7 support line;

Software                           Vision running under Microsoft®
                                       Windows XP® Professional; Production
                                       mode, built-in databasing with pass/fail
                                       for any parameter; Optional Stitching,
                                       MATLAB/TCPIP, Film Analysis, Optical
                                       Analysis, and SureVision


Vertical Measurement         0.1nm to 10mm std.
Range
Vertical Resolution1           <0.1nm


RMS Repeatability2            0.05nm


Vertical Scan Speed          User-selectable up to 24μm/sec


Lateral Spatial Sampling     0.1 to 13.2μm (≤160nm with high
                                       resolution camera)


Optical Resolution3            0.49μm min.

Field-of-View                    7.68 x 5.76mm max, 0.06 x 0.05mm min
                                       with std-resolution camera; 7.84 x
                                       5.87mm max, 0.09 x 0.07 min with
                                       high-res camera;


Reflectivity                        <1 to 100%


Step Height                       0.8% accuracy;
                                      <0.1% at 1σ repeatability


Profiler Footprint                320mm W x 510mm D x 645mm H;
                                       70kg (excluding peripheral electronics
                                       and air table)


Certifi cation                     CE, NRTL

문의   031-476-0977
        010-3762-3650