- High uniformity of illumination distribution with multi-mirror lamp house
- Automatic setting simplifies operation
- Z-axis control with digital micrometer (Enables soft contact)
- Accurate and quick alignment with binocular microscope
- Applicable up to Φ101.6mm(4 inch) substrates and 127mm(5 inch) square masks
- Mercury lamp; 500W
010-3762-3650
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