| Semiconductor/FPD Inspection Microscope Specifications | MX61L | MX61 | ||
| Optical System | UIS2 Optical System (Infinity-corrected) | |||
| Microscope Frame | Observation Method | BF/DF/DIC/KPO*/FL | ||
| Reflected/Transmitted | Reflected/Transmitted | |||
| Illuminator | Microscope Frame All-in-one (BF, DF + 1 Option) | |||
| Illumination System | Reflected Light | 100 W Halogen/100 W Mercury/75 W Xenon | ||
| Transmitted Light | Fiber Light Guide | |||
| Focus | Motorized/Manual | Manual | ||
| Stroke | 32 mm | |||
| Resolution/Fine Adjustment Sensitivity | Fine Stroke per Rotation 0.1 mm | |||
| Maximum Specimen Height | 30 mm | |||
| Revolving Nosepiece | Motorized Type | Sextuple for BF/DIC Quintuple for BF/DF/DIC Centerable Quintuple for BF/DF/DIC Sextuple for BF/DF/DIC | ||
| Manual Type | - | |||
| Stage | Stroke | 14x12 inch Right Handle Stage: 356(X)x305(Y)mm (Transmitted Light Range 356x284 mm) | 8x8 inch Right Handle Stage: 210(X)x210(Y)mm (Transmitted Light Range 189x189 mm) 6x6 inch Right Handle Stage: 158(X)x158(Y)mm | |
| Observation Tube | Widefield (Field Number 22) | Inverted Image | Binocular/Trinocular Observation Tube | |
| Erect Image | Trinocular Observation Tube | |||
| Super Wide Field (Field Number 26.5) | Inverted Image | Trinocular Observation Tube | ||
| Erect Image | Tilting Trinocular Observation Tube | |||
| Option Unit | IR Unit/Motorized Stage/Wafer Loader | |||
| Dimensions | 710(W)x843(D)x507(H)mm (in Standard Combination) | 509(W)x843(D)x507(H)mm (in Standard Combination) | ||
| Weight | 51 kg (in Standard Combination) | 40 kg (in Standard Combination) | ||
| Remark | *Simple Polarized Light Observation | |||
문의 031-476-0977
010-3762-3650
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