| HARDWARE SPECIFICATION | |
 | Temp. Control Range : 300 ~ 1000 ˚C |
| | Max. Temp : 1000 ˚C |
| | Ramp-up Rate : 10 ~ 80 ˚C/sec |
| | Temp. Repeatability : ≤2 ˚C |
| | Lamp-type : Circular type (8 zones) |
| | Lamp Life-time : > 5000 hrs |
| | Thermocouple Control & PID Control |
| | MTBF : > 3,000 hrs |
| | Up-time : 95 % |
| | Standard 3 Gas Lines : N2, O2, Spare |
| | Dimension : 800W ⅹ 1200L ⅹ 1800H |
| APPLICATIONS | |
| | Semi-Auto Process |
| | 2", 3" LED/LD, 4", 6" GaAs/Si |
| | No. of Processing Wafers : 5 Wafers (2") |
| 3 Wafers (3") | |
| | Temp. Uniformity : < 5.0 ˚C |
| | System Pressure : Atmosphere (ATM) |
Maker : New Young M Tech
Model : RTA150H-SP
Mail : phm7910@naver.com
Mobile : +821037623650
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