 Specification
 Resolution
| 3.5nm (30kV, SE image) |
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| Magnification | 30x~300,000x |
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| Accelerating voltage | 0.5kV~30kV |
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| Electron gun | Tungsten filament, Precentered cartridge filament |
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| Lens system | 3-step lens system |
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| Objective iris | 4 holes variable aperture |
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| Image shift | ±20㎛ (WD: 5㎜) |
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| Stage | X.Y.Z.T.R 5-axis system
X: 60㎜, Y: 40㎜, Z: 5~50㎜, T: -20°~+90°, R: 360°
Motor drive unit with image navigation software |
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| OS | PC controlled by PCI, USB, PC pentium4 compatible,
Windows XP, GUI/Mouse & Keyboard |
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| Scanning mode | RED screen scan mode: 320 x 240 pixel
Slow screen scan mode: 640 x 480 pixel (3steps)
Photo screen capture mode 1: 1280 x 960 pixel
Photo screen capture mode 2: 2560 x 1920 pixel
Waveform observation mode
Freeze mode |
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| Image format | JPG, TIFF, BMP |
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| Monitor output | English/Korean |
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| Vacuum system | Fully automated turbo molecular pump 210L/sec
Rotary pump 100L/sec |
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| Size & Weight | Main system: 77(W)x88(D)x150(H)㎝, 310㎏
Operation table: 85(W)x80(D)x70(H)㎝, 10㎏ |
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| Requirements | Power AC 220V, 60Hz, 2kVA
Temperature 15℃~30℃ |
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